Investigation of the structural-phase state and mechanical properties of ZrCrN coatings obtained by plasma-assisted vacuum arc evaporation

OBRABOTKAMETALLOV MATERIAL SCIENCE Vol. 24 No. 1 2022 a b Fig. 3. Void volume (a) and material volume (b) per unit area of coatings: CrN (1), ZrN (2), ZrCrN-1 (3), ZrCrN-2 (4), ZrCrN-3 (5), ZrCrN-4 (6) a b c d e f Fig. 4. SEM images of the coating surface: CrN (a), ZrN (b), ZrCrN-1 (c), ZrCrN-2 (d), ZrCrN-3 (e), ZrCrN-4 (f) coating exhibits no grains and has an inhomogeneous surface relief, which is consistent with the roughness studies. Multilayer ZrCrN-1 coating (Fig. 4c) is similar in surface morphology to ZrN, as its upper layer is of zirconium nitride. The surface morphology of ZrCrN-2…ZrCrN-4 coatings is represented by smaller elements, but it is diffi cult to classify it into independent elements due to its nanoscale size.

RkJQdWJsaXNoZXIy MTk0ODM1