Investigation of the structural-phase state and mechanical properties of ZrCrN coatings obtained by plasma-assisted vacuum arc evaporation

OBRABOTKAMETALLOV MATERIAL SCIENCE Vol. 24 No. 1 2022 The cross-sectional image of the fracture surface of ZrCrN-1 coating (Fig. 5a) shows its multilayer structure with an average layer thickness of ~100 nm. The planarity of the layers is slightly distorted; no defects such as pores or delaminations are observed; the interface with the substrate is also free of defects. The total number of layers in the coating is 72. Fig. 5. Cross-sectional SEM images of the fracture surface of multilayer coatings: ZrCrN-1 (a), ZrCrN-2 (b), ZrCrN-3 (c), ZrCrN-4 (d) a b c d The SEM micrograph of the fracture surface of ZrCrN-2…ZrCrN-4 coatings (Figs. 5b–5d) also exhibits a nanosized structure, but without well-defi ned layers. The thickness of ZrCrN coatings is about 4.5±0.5 μm. The absence of signifi cant defects at the substrate–coating interface indicates a strong bond and good adhesion between the coating and the substrate. Otherwise, the coating would locally peel off as a result of cleavage. Analysis of X-ray diffraction profi les (Fig. 6) showed that the X-ray intensity is rather high and radiation reaches not only the coating but also the substrate, as confi rmed by the presence of refl ections belonging

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