OBRABOTKAMETALLOV MATERIAL SCIENCE Vol. 24 No. 3 2022 Fig. 3. Chemical element distribution in ZrN/CrN-0.5 multilayer coating (a), micro diffraction patterns of multilayer coatings formed at ZrN/CrN-0.5 (b), ZrN/CrN-3.5 (c) and ZrN/CrN-8 (d) modes a b c d where E is the effective elasticity modulus obtained from nanoindentation; νML is the Poisson ratio, Θ0 is the diffraction angle of incident synchrotron beam on a stress-free coating; ΘΨx is the diffraction angle of incident synchrotron beam on a coating with residual stress for crystalline planes normal to (Ψ) the incident beam axis. The fi rst stage was obtaining primary Bregg-Brentano diffraction patterns and 2Θ0 refl ection positions from the ZrN/CrN multilayer coatings according to symmetrical XRD procedure (Fig. 4). XRD FCC peaks such as (200)CrN and (222)ZrN were chosen for determining the residual stress taking into account the best accuracy reasons. An obstacle was that there were WC peaks shining from underneath substrate in the form of very narrow peaks. The XRD pattern in Fig. 4 allows observing some variation of a textured coating’s component. Thus, almost invisible at 2Θ=56.7° (220)ZrN peak in the ZrN/CrN-0.5 coating became very noticeable in samples ZrN/CrN-3.5 and ZrN/CrN-8, i.e at higher rotation rates. Such a fi nding allows suggesting that the ZrN crystallites have no preferential growth axis during deposition at faster rotation. Asymmetrical XRD were then carried out at Ψ angles 0°, 5°, 10°, 15°, 20°, 25°, 30° and a series of corresponding diffraction patterns in the vicinity of the (222)ZrN peak (red line) are shown in Fig. 5 for sample ZrN/CrN-0.5.
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