In-situ analysis of ZrN/CrN multilayer coatings under heating

OBRABOTKAMETALLOV MATERIAL SCIENCE Vol. 25 No. 2 2023 a b Fig. 2. Projections of X-ray diffraction patterns, in pseudocolor gradation, denoting the signal intensity when taking X-ray diffraction patterns: a – ZrN/CrN 0.5 rpm; b – ZrN/CrN 8 rpm а b Fig. 3. A series of X-ray diffraction patterns of an experimental sample with a multilayer ZrN/CrN coating, obtained by asymmetric imaging using synchrotron radiation when heating from 30°C to 750°C: a – ZrN/CrN 0.5 rpm; b – ZrN/CrN 8 rpm Ta b l e 1 Characteristics of phase reflections in the sample with multilayer coating of CrN/ZrN obtained at a substrate holder rotation speed of 0.5 rpm depending on the temperature of exposure Temperature, °C Reflection, phase d, Å FWHM, deg. a, nm 50 (111) ZrN 2.654 1.0131 4.5965 (111) CrN 2.45 1.5584 4.2426 100 (111) ZrN 2.653 1.0433 4.5956 (111) CrN 2.44 1.3269 4.2265 200 (111) ZrN 2.658 0.9849 4.6030 (111) CrN 2.45 1.4758 4.2428 400 (111) ZrN 2.662 0.9586 4.6105 (111) CrN 2.456 1.5005 4.2540 500 (111) ZrN 2.664 0.915 4.6145 (111) CrN 2.454 1.4635 4.2511 550 (111) ZrN 2.662 0.8375 4.6103 (111) CrN 2.455 1.5585 4.2516

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