OBRABOTKAMETALLOV MATERIAL SCIENCE Vol. 25 No. 4 2023 Figs. 4, a–d demonstrate the deformation change of the lattice for the investigated nitride coatings throughout the entire thermal cycling process, while the lattice deformation of the VK8 alloy substrate coating shows periodic behavior and linear dependence. Interestingly, the lattice deformation gradually increases with temperature up to 800 °C, which is usually uncommon. Stressed lattices typically relax at high temperatures. Fig. 5 illustrates the evolution of the FWHM (full-width at half-maximum) of selected reflection planes for the nitride coatings and substrate. It is evident that the FWHM dependencies of the crystalline planes differ between the specimens with single-component coatings (figs. 5, a, c, d) and the specimens with multilayer coatings (figs. 5, b, e). Distinguishing between heating and cooling cycles based on the FWHM data proved to be impossible for the CrN phase of both the single-component (fig. 5, c) and multilayer (fig. 5, d) coatings. In these cases, a b a d e f Fig. 4. Crystal lattice deformations as a function of temperature of the thermal cycling process of components of single-component coatings (a, c), multilayer coatings (b, d) and substrate (e, f)
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