OBRABOTKAMETALLOV MATERIAL SCIENCE Vol. 25 No. 4 2023 Fig. 5. FWHM evolution of selected reflection planes of nitride single-component coatings (a, c), multilayer coatings (b, d) and substrate (e, f) a b c d e f a general slope of the FWHM dependence with respect to the thermal cycling time is observed. In the case of the ZrN phase of the single-component (fig. 5, a) and multilayer (fig. 5, b) coatings, periodic increases and decreases in FWHM values are observed. Moreover, compared to the similar graph for the substrate, the periods of FWHM variation occur with a shift of half a period for the specimen with the multilayer coating (figs. 5, b, e). Conversely, for the specimen with the single-component coating (figs. 5, a, d), the periods of FWHM decrease and increase coincide. It should be noted that the FWHM (full-width at half-maximum) of the (111) plane for the nitride coatings generally remains almost unchanged before and after the thermal cycling process. The trend of
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