Obrabotka Metallov 2013 No. 4

ОБРАБОТКА МЕТАЛЛОВ № 4 (61) 2013 78 МАТЕРИАЛОВЕДЕНИЕ Obrabotka metallov N 4(61), October–December 2013, Pages 71-78 Effect of the temperature conditions of the molecular beam epitaxy on morphology and electrical properties of the CaF 2 layers A.V. Katsyuba, A.Y. Krupin, S.S. Kudaev Novosibirsk State Technical University, Prospekt K. Marksa, 20, Novosibirsk, 630073, Russia E-mail: kacuba@ngs.ru Received 15 October 2013 Revised 14 November 2013 Accepted 15 November 2013 Abstract The change in morphology and electrical parameters of calcium fluoride films grown by molecular beam epitaxy (MBE) as a function of temperature and mode of growth are considered. It is shown that the temperature increase leads to a sharp surface roughening, and obtained CaF 2 film is not continuous, that is unacceptable for creating SOI structures. It is also shown that the use of the solid phase epitaxy (SPE) and the growth temperature of 530 o C gives opportunity to produce solid films with good electrical parameters. The samples, that were grown without the use of TFE have poor electrical parameters and a large variation in leakage current’s values through the wafer. Keywords: molecular beam epitaxy, calcium fluoride, solid-phase epitaxy. References 1. Mordkovich V.N. Izvestija vysshih uchebnyh zavedenij. Materialy jelektronnoj tehniki , 1998, no. 2, pp. 4 – 7. 2. Vjalyh D.V., Fedoseenko S.I. Fizika Tonkih Plenok , 1999, Vol. 33, Issue 6, pp. 708–711. 3. Fathauer R.W. Surface morphology of epitaxial CaF 2 films on Si substrates. Applied Physics Letters. 1984, Vol. 45, no. 5, pp. 519-521. 4. Ioannou – Sougleridis V., Nassiopoulou A.G., Ouisse T., Bassani F., Arnaud d,Avitaya F. Electroluminescence from silicon nanocrystals in Si/CaF 2 superlattices. Applied Physics Letters. 2001, Vol. 79, no. 13, pp. 2076-2078. 5. Kacjuba A.V., Krupin A.Yu. Izmerenie morfologii plenok CaF 2 pod dejstviem jelektronnogo puchka v processe molekuljarno-luchevoj jepitaksii [Measuring the morphology of the CaF 2 films by electron beam during molecular beam epitaxy]. 3-ja Vserossijskaja molodezhnaja konferencija s jelementami nauchnoj shkoly «Funkcional’nye nanomaterialy i vysokochistye veshhestva» [3rd National Youth Conference with the elements of the scientific school “Functional nanomaterials and high-matter”]. Moscow, MUCTR, 2012, pp. 47–49.