OBRABOTKAMETALLOV Vol. 24 No. 3 2022 87 MATERIAL SCIENCE Microstructure and residual stresses of ZrN/CrN multilayer coatings formed by the plasma-assisted vacuum-arc method Andrey Vorontsov 1, a, Andrey Filippov 1, b,*, Nikolay Shamarin 1, c, Evgenij Moskvichev1, d, Ol’ga Novitskaya1, e, Evgenii Knyazhev1, f, Yuliya Denisova2, g, Andrei Leonov2, h, Vladimir Denisov2, i 1 Institute of Strenght Physics and Materials Sciences SB RAS, 2/4 per. Academicheskii, Tomsk, 634055, Russian Federation 2 Institute of High Current Electronics SB RAS, 2/3 per. Academicheskii, Tomsk, 634055, Russian Federation a https://orcid.org/0000-0002-4334-7616, vav@ispms.ru, b https://orcid.org/0000-0003-0487-8382, andrey.v.fi lippov@yandex.ru, c https://orcid.org/0000-0002-4649-6465, shnn@ispms.ru, d https://orcid.org/0000-0002-9139-0846, em_tsu@mail.ru, e https://orcid.org/0000-0003-1043-4489, nos@ispms.tsc.ru, f https://orcid.org/0000-0002-1984-9720, zhenya4825@gmail.com, g https://orcid.org/0000-0002-3069-1434, yukolubaeva@mail.ru, h https://orcid.org/0000-0001-6645-3879, laa-91@yandex.ru, i https://orcid.org/0000-0002-5446-2337, volodyadenisov@yandex.ru Obrabotka metallov - Metal Working and Material Science Journal homepage: http://journals.nstu.ru/obrabotka_metallov Obrabotka metallov (tekhnologiya, oborudovanie, instrumenty) = Metal Working and Material Science. 2022 vol. 24 no. 3 pp. 76–89 ISSN: 1994-6309 (print) / 2541-819X (online) DOI: 10.17212/1994-6309-2022-24.3-76-89 ART I CLE I NFO Article history: Received: 16 May 2022 Revised: 31 May 2022 Accepted: 18 June 2022 Available online: 15 September 2022 Keywords: Coating TEM investigation Nitrides X-Ray analysis Phase composition Funding The work was carried out with the fi nancial support of the Russian Federation represented by the Ministry of Science and Higher Education (project No. 075-15-20211348) within the framework of event No. 1.1.16. Acknowledgements Research were partially conducted at core facility “Structure, mechanical and physical properties of materials”. ABSTRACT Introduction. The current state of the art in the fi eld of hard coatings application requires the formation of nanostructured compositions using different chemical elements. Modern hard coatings are able to combine different properties such as high hardness, wear resistance, corrosion resistance. At present, coatings formed by layer-by-layer deposition of zirconium and chromium nitrides are promising. When depositing combinations of chemical elements on various substrates, studies are required aimed at investigating its microstructure and, mainly, residual stresses formed during the deposition of multilayer coatings. The purpose of this work is to investigate the structural-phase state and residual stresses of ZrN/CrN system coatings formed by plasma-assisted vacuum-arc method from the gas phase. Research methods. Samples with coatings of zirconium and chromium nitrides deposited on substrates of hard alloy VК8 are investigated. Transmission electron microscopy is used to study the microstructural characteristics of multilayered coatings and X-ray diffraction analysis is used to quantify macroscopic stresses. Results and discussion. Based on the experimental results obtained it is found that changing the modes of deposition of multilayer ZrN/CrN coatings with regard to rotation speeds of table and substrate holder leads to variations in microstructure, morphology and internal stresses of surface layers of multilayer coatings. It is shown that by changing conditions for the multilayer coating deposition the possibilities of forming ZrN/CrN coatings on the substrate made of VK8 alloy with nanoscale thickness of coating layers open up. X-ray diffraction analysis indicates mainly insignifi cant stresses, and at high table and substrate rotation speeds – high compressive stresses in the multilayer coating. Transmission electron microscopy revealed that CrN and ZrN coatings have a common multilayer coating growth texture at low rotation speeds, and at high speeds a textural misorientation of the phases of the coating layers is observed. Based on the results obtained it is possible to recommend coatings of ZrN/CrN system as hard coatings. For citation: Vorontsov A.V., Filippov A.V., Shamarin N.N., Moskvichev E.N., Novitskaya O.S., Knyazhev E.O., Denisova Yu.A., Leonov A.A., Denisov V.V. Microstructure and residual stresses of ZrN/CrN multilayer coatings formed by the plasma-assisted vacuumarc method. Obrabotka metallov (tekhnologiya, oborudovanie, instrumenty) = Metal Working and Material Science, 2022, vol. 24, no. 3, pp. 76–89. DOI: 10.17212/1994-6309-2022-24.3-76-89. (In Russian). ______ * Corresponding author Vorontsov Andrey V., Ph.D. (Engineering), Research assistant Institute of Strenght Physics and Materials Sciences SB RAS, 2/4 per. Academicheskii, 634055, Tomsk, Russian Federation Tel.: 8 (983) 239-34-17, e-mail: vav@ispms.ru
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