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ACADEMY OF SCIENCES

The paper presents the results of the research into the effect of the electrodes non-parallelism on electromechanical interactions in MEMS with a lateral displacement of electrodes in the vol­tage controlled operating mode. The analysis was carried out for two cases of a movable electrode movement: with increasing and with decreasing an average interelectrode gap. Expressions were obtained for the calculation of capacitances, potential energies, electrostatic forces, critical vol­tage, and a critical displacement of a movable electrode at different slopes of the electrodes.

It was established that in MEMS with a lateral displacement of non-parallel electrodes, with increasing an average interelectrode gap, a controlled displacement of the movable electrode is possible in the entire range of its length at any applied voltages and a mutual slope of the electrodes.

It was found that in MEMS with a  lateral displacement of non-parallel electrodes, with decreasing an average interelectrode gap, an unstable state of the system is possible, leading to an uncontrolled movement of the movable electrode directed towards increasing an electrode overlap area – a critical effect (similar to “pull-in instability”). Thus, the movement of a movable electrode with increasing an average interelectrode gap is unstable in contrast to the movement with decreasing an average interelectrode gap. After the onset of a critical state, the system ceases to respond to changes in control voltage. It was shown that this critical effect is possible with system parameters  and . It was ascertained that in this case, with an increase in the mutual slope of the electrodes, the value of a critical displacement of the movable electrode decreases, and the dependence of the critical voltage  on  is almost linear at .

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