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The article presents testing results of electron beam processing (EBP) modes applied on the diffusion layers based on boron and aluminum produced on the surface of steel 20. An ion current feedback loop in the accelerating gap in a modernized plasma electron source allows increasing the beam generation control and the electrical strength of the accelerating gap. This ensures sample surface processing at a specified temperature. In order to ensure the EBP process stability, it is proposed to preheat the surface to a temperature range of 400-700? by pulses with a controlled current. Further modification of the diffusion layers is conducted on the surface at a temperature of around 1900?. Ensuring this temperature range demands the discharge current within the range of 20 - 150A during a single pulse with a duration of 950 μs. The total number of pulses is three and the interval between them is 3 seconds. These processing modes lead to a structural transformation of the diffusion layer to a depth of more than 150 μm and to a significant microhardness increase. The approved EBP modes can be recommended as a promising alternate approach of the combined modification technologies of diffusion layers based on boron and aluminum.

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